Vacuum pumping speed and configuration of vacuum unit


Different vacuum systems require different degrees of vacuum. Therefore, a set of vacuum units must be used to complete, that is, the vacuum pumps working in different pressure ranges are connected in series.
The vacuum pump on the high-vacuum side can achieve the vacuum required by the system, while the vacuum pump on the low-vacuum side is directly exhausted to the atmosphere. Obviously, the simplest vacuum unit is a straight-line vacuum pump. However, high-vacuum systems generally require three-stage units, and medium-vacuum systems generally require two-stage units.
A high vacuum pump and a low vacuum pump are difficult to form an effective high vacuum unit. There are several reasons for this. Traffic continuity is one of them. High-vacuum pumps have the limitation of the pressure resistance of the fore stage, that is, the fore stage is higher than a certain pressure, the pump cannot work normally. When the current stage pump reaches this critical pressure, the pumping speed is often reduced, so that the exhaust flow of the foreline pump may be less than the exhaust flow of the main pump. This inconsistency of the flow destroys the requirement of flow continuity and is inevitable. Will cause the vacuum unit to malfunction. However, if another medium vacuum pump is connected between the high and low vacuum pumps, it can play a role of connecting and unloading, the flow is continuous, and each pump can work in the best state. Roots pump can work in the middle vacuum range, which is the most suitable, so it is also called Roots booster pump, because its compression ratio is not high, it can be connected to the range of several Pa to several hundred Pa. When the three-stage high-vacuum unit enters a higher vacuum degree, the exhaust flow of the main pump is significantly reduced. At this time, only a smaller foreline pump can maintain the continuity of air extraction. In actual use, this It is often used, which can reduce the energy consumption of the unit.

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