Vacuum pumping speed and configuration of vacuum unit
Different vacuum systems require different degrees of vacuum. Therefore, a set of vacuum units must be used to complete, that is, the vacuum pumps working in different pressure ranges are connected in series. The vacuum pump on the high-vacuum side can achieve the vacuum required by the system, while the vacuum pump on the low-vacuum side is directly exhausted to the atmosphere. Obviously, the simplest vacuum unit is a straight-line vacuum pump. However, high-vacuum systems generally require three-stage units, and medium-vacuum systems generally require two-stage units. A high vacuum pump and a low vacuum pump are difficult to form an effective high vacuum unit. There are several reasons for this. Traffic continuity is one of them. High-vacuum pumps have the limitation of the pressure resistance of the fore stage, that is, the fore stage is higher than a certain pressure, the pump cannot work normally. When the current stage pump reaches this critical pressure, the pump